Computer Programming

This course introduces engineering science and technology for design and fabrication of micro and Nano systems. We will discuss both practical processing techniques as well as fundamental knowledge behind them. Major fabrication technologies such as wafer preparation, thermal processes, lithographic methods, thin-film deposition, wet and dry etching will be analyzed. The discussion will be based upon silicon wafer processes primarily while examples of processing techniques for other materials will also be presented. Also, micro design rules and challenges, sensing and actuating methods and mems application will be discussed.

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